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A. M. Sobolev
A. M. Sobolev
Ivanovo State University of Chemistry and Technology
Plasma parameters
Analytical chemistry
Etching
Materials science
Kinetics
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Kinetics of the Volumetric and Heterogeneous Processes in the Plasma of a C 4 F 8 + O 2 + Ar Mixture
2021
Russian Microelectronics
Alexander Efremov
D. B. Murin
A. M. Sobolev
K-H Kwon
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