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T.O. Sedwick
T.O. Sedwick
IBM
Crystal growth
Chemical vapor deposition
Dopant
Doping
Monolayer
1
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14
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Atomic layer doping for Si
1993
Thin Solid Films
D. A. Grützmacher
K. Eberl
A.R. Powell
Bruce Ek
T.O. Sedwick
S. S. Iyer
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Citations (14)
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