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Lujun Bai
Lujun Bai
Fabry–Pérot interferometer
Blazed grating
Spectroscopy
Laser
Excimer laser
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Echelle and etalon used for spectral metrology of excimer laser lithographic light sources at 193nm
2015
Fei Gao
Jiangshan Zhao
Guangyi Liu
Qian Wang
Lujun Bai
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