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J. Evmerv
J. Evmerv
Ion implantation
Anodic bonding
Isotropic etching
Misorientation
Optics
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Ultra high precision of the tilt/twist misorientation angles in silicon/silicon direct wafer bonding
2003
Frank Fournel
Hubert Moriceau
F. Lerov
J. Evmerv
Pascal Gentile
K. Rousseau
Jean-Luc Rouviere
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