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tadami tanaka
tadami tanaka
Optoelectronics
Single crystal
Crystallography
Inert gas
Wafer
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A silicon wafer and a method of manufacturing the same, and a silicon single crystal growing method
2004
hourai masataka
masataka hourai
wataru sugimura
ono tosiaki
tosiaki ono
Zhongzhongmei Tian
tadami tanaka
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