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syouzi ikuhara
syouzi ikuhara
Materials science
Etching
Optoelectronics
Process engineering
Analytical chemistry
6
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Etching end point determination methods
2008
Zhangzinei Tian
daisuke siroisi
syouzi ikuhara
akira kanoko sima
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Monitoring method for an etching apparatus and method for measuring self-bias voltage and an etching apparatus
2006
hideyuki yamamoto
syouzi ikuhara
daisuke siroisi
akira kanoko sima
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The plasma processing apparatus and processing method
2000
tosio masuda
hideyuki yamamoto
syouzi ikuhara
natuyo morioka
haozhijunei
kenzi tamaki
jun'iti tanaka
akira kanoko sima
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