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Detlef Michelsson
Detlef Michelsson
Materials science
Wafer
Segmentation
Optoelectronics
Substrate (electronics)
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Optical Imaging Metrology Calibration using High Voltage Scanning Electron Microscope at After-Development Inspection for Advanced Processes
2020
Nadav Gutman
Inna Tarshish
Roel Gronheid
Chen Dror
Detlef Michelsson
Henning Backhauss
Liat Levin
Vladimir Levinski
Yuri Paskover
Liran Yerushalmi
Thomas Heidrich
Slawomir Czerkas
Ulrich Pohlmann
Frank Laske
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Verfahren zur Erkennung unvollständiger Randentlackung eines scheibenförmigen Objekts
2005
Henning Backhauss
Detlef Michelsson
Gert Weniger
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Verfahren zur visuellen Inspektion einer Randentlackungskante eines scheibenförmigen Objekts
2005
Henning Backhauss
Detlef Michelsson
Gert Weniger
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A method for inspecting a wafer
2004
Henning Backhauss
Albert Kreh
Detlef Michelsson
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A method for segmentation defect in structures on semiconductor substrates
2003
Bernd Jungmann
Thin Van Luu
Detlef Michelsson
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