Old Web
English
Sign In
Acemap
>
authorDetail
>
Eiji Yoshikawa
Eiji Yoshikawa
Mitsubishi
Materials science
Analytical chemistry
Chemical vapor deposition
Residual stress
stress gradient
4
Papers
14
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (4)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
妊娠リスクスコアの利用状況と妊産婦のリスク評価に関する検討 : 産科診療所における後方視調査より (研究ノート)
2012
kyouko kanamori
Kyoko Kanamori
ti sakae sakamoto
Chie Sakamoto
akiko yamada
Akiko Yamada
katura nakano
Katsura Nakano
eizi yosikawa
Eiji Yoshikawa
keisi tada tomo
Keishi Tadatomo
Show All
Source
Cite
Save
Citations (0)
Influence of RTA parameters on residual stress and stress gradient of multilayered LPCVD polysilicon film
2004
Sensors and Materials
Eiji Yoshikawa
Masahiro Tsugai
Makio Horikawa
Hiroshi Otani
Shigeru Hamada
Show All
Source
Cite
Save
Citations (1)
Influence of RTA parameters on residual stress and stress gradient of multilayered LPCVD polysilicon film
2002
MEMS | International Conference on Micro Electro Mechanical Systems
Eiji Yoshikawa
Masahiro Tsugai
Makio Horikawa
Hiroshi Otani
Shigeru Hamada
Show All
Source
Cite
Save
Citations (7)
Design optimization and improved performance on the link beam driven, miniaturized scanning mirror device
2000
MEMS | IEEE/LEOS International Conference on Optical MEMS
Nobuaki Konno
Masahiro Tsugai
Eiji Yoshikawa
Teruo Usami
R. Fujita
Show All
Source
Cite
Save
Citations (6)
1