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Julien Vallade

Centre national de la recherche scientifique

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Effect of glow DBD modulation on gas and thin film chemical composition: case of Ar/SiH4/NH3 mixture

2014 Journal of Physics D
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Fourier-transformed infrared absorption spectroscopy: a tool to characterize the chemical composition of Ar?NH3?SiH4 dielectric barrier discharge

2013 Journal of Physics D
- Julien Vallade
- F. Massines
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a-SiNx:H Antireflective And Passivation Layer Deposited By Atmospheric Pressure Plasma

2012 Energy Procedia
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