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Koichiro Ochiai
Koichiro Ochiai
Sumitomo Chemical
Dry etching
Methacrylate
Styrene
Dissolution
Copolymer
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Tandem type resin for chemically amplified KrF positive resist
2002
Yasunori Uetani
Masumi Suetsugu
Koichiro Ochiai
Airi Yamada
Ryotaro Hanawa
Nobuo Ando
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