Old Web
English
Sign In
Acemap
>
authorDetail
>
Herb Kura
Herb Kura
Analytical chemistry
Polishing
Tungsten
Wafer
Chemical-mechanical planarization
1
Papers
12
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Modeling and Characterization of Tungsten Chemical and Mechanical Polishing Processes
2001
Journal of The Electrochemical Society
John Zabasajja
Tushar P. Merchant
Belinda Ng
Suman Banerjee
David Green
Scott Lawing
Herb Kura
Show All
Source
Cite
Save
Citations (12)
1