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Jim Wiley
Jim Wiley
ASML Holding
Extreme ultraviolet lithography
Optics
Mask inspection
Materials science
Photolithography
3
Papers
17
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0
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2024
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E-beam based EUV mask characterization for studying mask induced wafer effects
2018
Vidya Vaenkatesan
Qing Tian
Emily Gallagher
Jim Wiley
Jo Finders
Michael Kubis
Jan Mulkens
Chiyan Kuan
Kevin Gao
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NXE pellicle: development update
2016
Derk Brouns
Aage Bendiksen
Par Broman
Eric Casimiri
Paul Colsters
Dennis de Graaf
Hilary Harrold
Piet Hennus
Paul Janssen
Ronald Kramer
Matthias Kruizinga
Henk Kuntzel
Raymond Wilhelmus Louis Lafarre
Andrea Mancuso
David Ockwell
Daniel Smith
David van de Weg
Jim Wiley
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