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Xiaojiang Pan
Xiaojiang Pan
Cymer, Inc.
Materials science
Laser
Excimer laser
Photolithography
Lithography
4
Papers
2
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Laser ultraviolet profond a grande puissance equipe d'une optique a longue duree de vie
2003
Thomas A. Yager
William N. Partlo
Richard L. Sandstrom
Xiaojiang Pan
John T. Melchior
John M Algots
Matthew Ball
Alexander I. Ershov
Vladimir B. Fleurov
Walter D. Gillespie
Holger K. Glatzel
Leonard Lublin
Elizabeth Marsh
Richard G. Morton
Richard C. Ujazdowki
David J. Warkentin
R. Kyle Webb
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Next-generation 193-nm laser for sub-100-nm lithography
2001
Thomas P. Duffey
Gerry M. Blumenstock
Vladimir B. Fleurov
Xiaojiang Pan
Peter C. Newman
Holger K. Glatzel
Tom A. Watson
Jeffrey Erxmeyer
Ralf Kuschnereit
Bernhard Weigl
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Dual-wavelength injection-seeded pulsed Ti:Sapphire laser
1997
Yan Liao
Thomas Walther
Remus Nicolaescu
Xiaojiang Pan
Edward S. Fry
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