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Ph. Auvray
Ph. Auvray
École Polytechnique
Capacitive sensing
Flux
Standing wave
Plasma
RF power amplifier
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Ion flux nonuniformities in large-area high-frequency capacitive discharges
2003
Applied Physics Letters
A. Perret
Pascal Chabert
Jean-Paul Booth
Jacques Jolly
Jean Guillon
Ph. Auvray
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Citations (118)
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