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W. Xing
W. Xing
Chinese Academy of Sciences
Dry etching
Evaporation (deposition)
Scanning electron microscope
Analytical chemistry
Reactive-ion etching
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Dry etched SiO2 Mask for HgCdTe Etching Process
2016
Journal of Electronic Materials
Yan Chen
Zhenhua Ye
C. H. Sun
L. G. Deng
S. Zhang
W. Xing
X.N. Hu
Ruijun Ding
Li He
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