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Alexane Vitale
Alexane Vitale
University of Orléans
Polymer
Porosity
Nanotechnology
Etching
Materials science
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Cryogenic Etching of Submicronic Features in Silicon Using Masks Based on Porous Polymer Films
2014
Thomas Tillocher
Alexane Vitale
Marylène Vayer
Nicolas Gosset
Philippe Lefaucheux
Christophe Sinturel
Mohamed Boufnichel
Remi Dussart
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