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Phil Grothe
Phil Grothe
FSI International, Inc.
Metallurgy
Electronic engineering
Wafer
Materials science
gate stack
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Gate Stack Formation using a Fully Integrated Single Wafer Cluster Tool
1997
MRS Proceedings
David C. Frystak
John Kuehne
R. Wise
Burt W. Fowler
Phil Grothe
Joel M. Barnett
Gary E. Miner
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