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Wenjiao B. Wang

University of Illinois at Urbana–Champaign

5

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50

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Superconformal coating and filling of deep trenches by chemical vapor deposition with forward-directed fluxes

2018 Journal of Vacuum Science and Technology
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Filling high aspect ratio trenches by superconformal chemical vapor deposition: Predictive modeling and experiment

2014 Journal of Applied Physics
- Wenjiao B. Wang
- John R. Abelson
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Superconformal chemical vapor deposition of thin films in deep features

2014 Journal of Vacuum Science and Technology
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Chemical vapor deposition of TiO2 thin films from a new halogen-free precursor

2014 Journal of Vacuum Science and Technology
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Highly conformal magnesium oxide thin films by low-temperature chemical vapor deposition from Mg(H3BNMe2BH3) 2 and water

2013 Applied Physics Letters
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