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D. Theirich
D. Theirich
Freudenberg Group
Reaction intermediate
Thin film
Molecule
Chemistry
Plasma-enhanced chemical vapor deposition
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Intermediate gas phase precursors during plasma CVD of HMDSO
2003
Vacuum
D. Theirich
Ch. Soll
F. Leu
Joseph Francis Engemann
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Citations (48)
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