author-photo

Mutsuo Uehara

Tokyo Institute of Technology

8

Papers

13

Citations

Citation Trend

Filter By

Papers (5) Sort By

Journal Conference Others

Composition Dependence of Crystal Structures and Electrical Properties of Ca-Mg-Si Films Prepared by Sputtering

2020 Journal of Electronic Materials
Show All
- Source
- Cite
- Save
Citations (0)
Growth of (111)-oriented epitaxial magnesium silicide (Mg2Si) films on (001) Al2O3 substrates by RF magnetron sputtering and their properties

2018 Journal of Materials Science
Show All
- Source
- Cite
- Save
Citations (3)
Evaluation of Chemical Stability in Perovskite-Type Proton-Conductive Oxide Thin-Films

2018 Science of Advanced Materials
Show All
- Source
- Cite
- Save
Citations (1)
Preparation of preferentially (111)-oriented Mg2Si thin films on (001)Al2O3 and (100)CaF2 substrates and their thermoelectric properties

2017 Japanese Journal of Applied Physics
Show All
- Source
- Cite
- Save
Citations (3)
Preparation of Ca-Si Films on (001) Al2O3 Substrates by an RF Magnetron Sputtering Method and Their Electrical Properties

2016 Journal of Electronic Materials
Show All
- Source
- Cite
- Save
Citations (3)