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Rebecca Howland Pinto
Rebecca Howland Pinto
KLA-Tencor
Profilometer
Capacitor
Process control
Planarity testing
Throughput
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2
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Improved etch and CMP process control using in-line AFM
2004
Thomas Trenkler
Thomas Kraiss
Ulrich Mantz
Peter Weidner
Rebecca Howland Pinto
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