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Jan Frederik Van Steenbergen
Jan Frederik Van Steenbergen
Lithography
Multiple patterning
Acceleration voltage
Surface finish
Optics
1
Papers
6
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Ultimate lithographic performances of advanced resists CAR or non-CAR resist?
2012
Proceedings of SPIE
Jan Frederik Van Steenbergen
Noboru Ootsuka
Xavier Buch
B. Icard
Claire Sourd
Christophe Constancias
Bernard Dalzotto
Laurent Pain
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