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J.C. Rostaing
J.C. Rostaing
Silicon oxynitride
Plasma-enhanced chemical vapor deposition
Absorption spectroscopy
Plasma
Chemical composition
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Quantitative infrared characterization of plasma enhanced CVD silicon oxynitride films
1987
Journal of Non-crystalline Solids
J.C. Rostaing
Y. Cros
S.C. Gujrathi
S. Poulain
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Citations (28)
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