Old Web
English
Sign In
Acemap
>
authorDetail
>
Mitsura Hiura
Mitsura Hiura
Canon Inc.
Optoelectronics
Overlay
Nanoimprint lithography
Computer science
Optics
1
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Addressing nanoimprint lithography mix and match overlay using drop pattern compensation
2020
Anshuman Cherala
Se Hyuk Im
Mario J. Meissl
Logan Simpson
Ecron Thompson
Jin Choi
Mitsura Hiura
Satoshi Iino
Show All
Source
Cite
Save
Citations (0)
1