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Tagawa Syuji
Tagawa Syuji
Ion implantation
Etching (microfabrication)
Photoluminescence
Nanoscopic scale
Materials science
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Depth analysis of ultra-shallow junctions by photoluminescence with the aid of nano-scale wet etching
2012
Murai Gota
Okutani Masashi
Tagawa Syuji
Yoshimoto Masahiro
Woo Sik Yoo
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