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W.L ortz
W.L ortz
Glycin
Materials science
Abrasive
Doping
Coating
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Modified Abrasives based on fumed SiO 2 and Al 2 O 3 for the Cu CMP Process
2004
MRS Proceedings
D. Zeidler
J.-W. Bartha
W.L ortz
R. Brandes
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