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M Harrison
M Harrison
Infineon Technologies
Analytical chemistry
Dry etching
Isotropic etching
Reactive-ion etching
Etching (microfabrication)
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Surface tension and its role for vertical wet etching of silicon
2012
Journal of Micromechanics and Microengineering
Andre Brockmeier
F. J. Santos Rodriguez
M Harrison
U Hilleringmann
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Citations (15)
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