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Michael Klots
Michael Klots
Software deployment
Computer vision
Metrology
Artificial intelligence
Nanotechnology
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Improved scatterometry time-to-solution using virtual reference
2015
Proceedings of SPIE
Alok Vaid
Givantha Iddawela
Jamie Tsai
Gilad Wainreb
Paul Isbester
Byung Cheol (Charles) Kang
Michael Klots
Yinon Katz
Cornel Bozdog
Matt Sendelbach
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Citations (5)
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