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Jason Hwang
Jason Hwang
Synopsys
Proximity effect (audio)
Optical proximity correction
Scattering
Wafer
Resist
1
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2
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Mask process effect aware OPC modeling
2008
Kyoil Koo
Sooryong Lee
Jason Hwang
Daniel F. Beale
Matt St. John
Robert Lugg
Seung-Hee Baek
Munhoe Do
Jung-Hoe Choi
Young-Chang Kim
Minjong Hong
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