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P. Czuprynski
P. Czuprynski
Orange S.A.
Dielectric
Etching
X-ray photoelectron spectroscopy
Analytical chemistry
Plasma etching
1
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Characterization of Dielectric Etching Processes by X-Ray Photoelectron Spectroscopy Analyses in High Aspect Ratio Contact Holes
1999
Japanese Journal of Applied Physics
Olivier Joubert
P. Czuprynski
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Citations (9)
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