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Jouta Fukuhara
Jouta Fukuhara
Plasma
Analytical chemistry
Raw material
Materials science
Tetrafluoroethylene
2
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2024
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Study on separation and concentration techniques for C 2 F 4 gas synthesized by pure CF 4 plasma
2020
The Japan Society of Applied Physics
Hiromasa Ohmi
Rei Tanaka
Hiromichi Nakatsuka
Daiki Iino
Kazuaki Kurihara
Hiroyuki Fukumizu
Jouta Fukuhara
Hisataka Hayashi
Hiroaki Kakiuchi
Kiyoshi Yasutake
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On-site C 2 F 4 generation from CF 4 feedstock gas using moderate-pressure plasma
2020
The Japan Society of Applied Physics
Rei Tanaka
Tomoyuki Tanaka
Daiki Iino
Kazuaki Kurihara
Hiroyuki Fukumizu
Jouta Fukuhara
Hisataka Hayashi
Hiroaki kakiushi
Kiyoshi Yasutake
Hiromasa Ohmi
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