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E. elloy
E. elloy
Aspect ratio (aeronautics)
Microfabrication
Composite material
Materials science
Nanotechnology
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Microfabrication of high aspect ratio and complex monolithic suspended structures in glass
2002
IEEE\/ASME Journal of Microelectromechanical Systems
Anne-Gabrielle Pawlowski
E. elloy
A. Sayah
M. A. M. Gijs
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