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Manabu Oie
Manabu Oie
Materials science
Electronic engineering
Dielectric strength
Time-dependent gate oxide breakdown
Imagination
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Electrical properties and TDDB performance of Cu interconnects using ALD Ta(Al)N barrier and Ru liner for 7nm node and beyond
2016
IITC | International Interconnect Technology Conference
Yuki Kikuchi
Hiroaki Kawasaki
Hiroyuki Nagai
Kai-Hung Yu
Manabu Oie
Steve Consiglio
Cory Wajda
Kaoru Maekawa
Gert Leusink
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Intégration d'une couche barrière ald et d'un revêtement ru cvd pour remplissage cu sans vide
2015
Yu Kai-Hung
Toshio Hasegawa
Tadahiro Ishizaka
Manabu Oie
Fumitaka Amano
Steven Consiglio
Cory Wajda
Kaoru Maekawa
Gert Leusink
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