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W.J. Dai
W.J. Dai
Xi'an Jiaotong University
Thin film
Amorphous solid
Sputter deposition
Crystallite
Annealing (metallurgy)
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Thermal stability of RuZr alloy thin films as the diffusion barrier in Cu metallization
2014
Journal of Alloys and Compounds
Y. Meng
Z.X. Song
Dan Qian
W.J. Dai
J.F. Wang
Yongyi Li
Ke-Wei Xu
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Citations (11)
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