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Liang Wang
Liang Wang
GlobalFoundries
Extreme ultraviolet
Optics
Wafer
Multiple patterning
Physics
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Integration of an EUV metal layer: a 20/14nm demo
2014
Proceedings of SPIE
Craig Higgins
Erik Verduijn
Xiang Hu
Liang Wang
Mandeep Singh
Jerome Wandell
Sohan Singh Mehta
Jean Raymond Fakhoury
Mark A. Zaleski
Yi Zou
Hui Peng Koh
Pawitter Mangat
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