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Loewenhardt P
Loewenhardt P
Engineering management
Long-range planning
Engineering
Delphi method
Process management
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DPSチャンバーでの0.35μmおよびサブ0.35μm金属積層エッチ DPSチャンバとプロセス評価
1996
Ye Y
Ma D
Hanawa H
Loewenhardt P
Zhao A
Shiau J
Yan C
Webb T
Yin G
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