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Boris Vasilev
Boris Vasilev
GlobalFoundries
Corrosion
Consumables
Polishing
Ruthenium
Integrated circuit
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CMP process development for Cobalt liner integration at the 28-nm-node
2014
Johannes Koch
Sascha Bott
Marcus Wislicenus
Robert Krause
Lukas Gerlich
Benjamin Uhlig
Romy Liske
Boris Vasilev
Axel Preusse
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