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R. Kavari
R. Kavari
Hewlett-Packard
Gate oxide
NMOS logic
Photolithography
CMOS
Transistor
2
Papers
2
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100 nm CMOS gates patterned with 3σ below 10 nm
1998
Hua-yu Liu
Carlos H. Diaz
Chiu Chi
R. Kavari
Peng Cheng
Min Cao
B. Gleason
Brian S. Doyle
Wayne Greene
Gary W Ray
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100-nm CMOS gates patterned with 3 sigma below 10 nm
1998
Hua-yu Liu
Carlos H. Diaz
Chiu Chi
R. Kavari
Peng Cheng
Min Cao
Robert E. Gleason
Brian S. Doyle
Wayne Greene
Gary W Ray
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Citations (2)
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