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Machi Kajitani
Machi Kajitani
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Metrology
Coating
Reflectometry
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Metrology exposure-induced resist and ARC damage
2004
Jackie Yu
Anita Viswanathan
Mokoto Miyagi
Junichi Uchida
Lawrence Lane
Kelly A. Barry
Machi Kajitani
Toshihiko Kikuchi
K.C. Chan
Fred E. Stanke
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