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H.R. Raith
H.R. Raith
Scanning electron microscope
Optics
Lithography
Deflection (engineering)
Electron-beam lithography
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How to overcome the principal limitations of SEM columns for the use in e-beam lithography?
1999
Microelectronic Engineering
S. V. Dubonos
B.N. Gaifullin
H.R. Raith
A. Svintsov
S.I. Zaitsev
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