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hirotaka akimoto
hirotaka akimoto
Polishing
Chemical-mechanical planarization
Substrate (chemistry)
Solution set
Composite material
2
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Slurry polishing solution set, the polishing liquid and a polishing method of a substrate using these
2011
youyangyanye
hirotaka akimoto
takenori narita
tadahiro kimura
daisuke ryuugasaki
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金属酸化物粒子、これを含む研磨材、この研磨材を用いた基板の研磨方法及び研磨して得られる半導体装置の製造方法
2006
Hirotaka Akimoto
Yoichi Machii
Hiroki Terasaki
Masato Yoshida
makoto yosida
hiroki terasaki
youiti matii
hirotaka akimoto
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