Old Web
English
Sign In
Acemap
>
authorDetail
>
Sadamu Horie
Sadamu Horie
Surface roughness
Rheology
Flatness (systems theory)
Metallurgy
Polishing
1
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Evaluation of Silicon Wafer Polishing Pads — Rheological Behaviour of Polishing Pads and Improvement of Wafer Flatness
1992
Journal of The Japan Society for Precision Engineering
Yamato Samitsu
Takahumi Yoshida
Nobuo Yasunaga
Takashi Ohmoto
Sadamu Horie
Show All
Source
Cite
Save
Citations (0)
1