Old Web
English
Sign In
Acemap
>
authorDetail
>
A. Zakharov
A. Zakharov
Advanced Micro Devices
Ion implantation
Doping
Plasma
Dopant
Plasma ashing
1
Papers
1
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Non‐Fluorine Plasma Strip of HDI Resist for 45 nm
2008
A. Zakharov
Volker Grimm
C. Krueger
K. Han
Ivan Berry
Roger Sonnemans
Shijian Luo
Show All
Source
Cite
Save
Citations (1)
1