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Thomas Parson
Thomas Parson
Entegris
Materials science
Tungsten
Silicon nitride
Metallurgy
Composite material
4
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2
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Post-CMP Cleaners for Tungsten Advanced Nodes: 10nm and 7nm
2018
Solid State Phenomena
Ruben R. Lieten
Daniela White
Thomas Parson
Michael D. White
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Post-CMP Cleaners for Tungsten at Advanced Nodes
2016
Solid State Phenomena
Ruben R. Lieten
Daniela White
Thomas Parson
Shi Ning Jenq
Don Frye
Michael L. White
Lieve Teugels
Herbert Struyf
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