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H. Takaka
H. Takaka
AZ Electronic Materials
Optics
Coating
Analytical chemistry
Reflectivity
Photoresist
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Top antireflective coating process for 193 nm lithography
2001
MNC | International Microprocesses and Nanotechnology Conference
Yusuke Takano
K. Ijima
Y. Akiyama
H. Takaka
Bang-Chein Ho
Hou-Yu Chen
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