Old Web
English
Sign In
Acemap
>
authorDetail
>
Marco Englhard
Marco Englhard
Osram Opto Semiconductors GmbH
Wafer
Light-emitting diode
Epitaxy
Optoelectronics
Substrate (chemistry)
4
Papers
7
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (2)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Structural analysis of a phosphide-based epitaxial structure with a buried oxidized AlAs sacrificial layer
2017
Journal of Applied Physics
Marco Englhard
B. Reuters
J. Baur
Christoph Klemp
P. Zaumseil
T. Schroeder
Oliver Skibitzki
Show All
Source
Cite
Save
Citations (0)
A novel vacuum epitaxial lift-off (VELO) process for separation of hard GaAs substrate/carrier systems for a more green semiconductor LED production
2017
Materials Science in Semiconductor Processing
Marco Englhard
B. Reuters
F.B. Michaelis
Martin Rudolf Behringer
Petrus Sundgren
Christoph Klemp
Oliver Skibitzki
T. Schroeder
Show All
Source
Cite
Save
Citations (2)
1