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Stephen L. Hill
Stephen L. Hill
Bio-Rad Laboratories
Analytical chemistry
Lithography
Resist
Materials science
Fourier transform infrared spectroscopy
4
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17
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Parameter extraction framework for DUV lithography simulation
1999
Nickhil H. Jakatdar
Junwei Bao
Costas J. Spanos
Xinhui Niu
Joseph J. Bendik
Stephen L. Hill
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Citations (8)
Characterization of a positive chemically amplified photoresist for process control
1998
Nickhil H. Jakatdar
Xinhui Niu
Costas J. Spanos
Andrew R. Romano
Joseph J. Bendik
Ronald P. Kovacs
Stephen L. Hill
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Citations (8)
FTIR gas chromatographic analysis of perfumes
1992
H. Diederich
Phillip J. Stout
Stephen L. Hill
K. Krishnan
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Enhanced Polymer Discrimination By Infrared Microtransmission And Microreflectance Spectroscopy
1989
K. Krishnan
Phillip J. Stout
Stephen L. Hill
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1