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Miguel Ellman
Miguel Ellman
University of Navarra
Interference lithography
Materials science
Photolithography
Laser
Resist
4
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139
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Fabrication of sub-micrometric metallic hollow-core structures by laser interference lithography
2012
Applied Surface Science
N. Pérez
Txaber Tavera
Ainara Rodriguez
Miguel Ellman
I. Ayerdi
Santiago M. Olaizola
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Citations (14)
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