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J. Paufler

Fraunhofer Society

7

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59

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DEFORMABLE MICROMIRROR DEVICES AS PHASE-MODULATING HIGH-RESOLUTION LIGHT VALVES

1999 SPIE milestone series
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High-throughput optical direct write lithography

1997 Solid State Technology
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New system for fast submicron optical direct writing

1996 Microelectronic Engineering
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New system for fast submicron laser direct writing

1995
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Method and device for structuring a photolithographic layer

1995
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