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W. Katz
W. Katz
University of Illinois at Urbana–Champaign
Annealing (metallurgy)
Amorphous solid
Ion implantation
Laser
Analytical chemistry
3
Papers
12
Citations
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Annealing of ion‐implanted Si using scanned laser and electron beams
2008
J.F. Gibbons
A. Gat
Levy Gerzberg
A. Lietoila
J. L. Regolini
T. W. Sigmon
R. F. W. Pease
T. J. Magee
J. Peng
Jongill Hong
V. Deline
W. Katz
Peter Williams
C. A. Evans
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Citations (1)
Amorphous‐crystalline transition of arsenic‐implanted silicon caused by multiple‐pulsed ruby laser
1979
Journal of Applied Physics
J.F. Gibbons
J. L. Regolini
A. Lietoila
T. W. Sigmon
T. J. Magee
J. Peng
Jongill Hong
W. Katz
C. A. Evans
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Citations (3)
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